Silicon Devices and Process Integration

Name: Silicon Devices and Process Integration
Brand: Springer-Verlag New York Inc.
SKU: 9780387367989
Price: 891.68 RON
Availability: InStock

Deep Submicron and Nano-Scale Technologies

Autor: Badih El- Kareh

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Legare: Copertă tare

Editura: Springer-Verlag New York Inc.

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Silicon Devices and Process Integration covers state-of-the-art silicon devices, their characteristi...

Informații despre carte

Autor

Badih El- Kareh

Limbă

engleză

Legare

Carte - Copertă tare

Publicat

2009

Pagini

598

EAN

9780387367989

ISBN

0387367985

Enbook ID

01382042

Editura

Springer-Verlag New York Inc.

Greutate

1040

Dimensiuni

155 x 235 x 45

Descriere completă

Silicon Devices and Process Integration covers state-of-the-art silicon devices, their characteristics, and their interactions with process parameters. It serves as a comprehensive guide which addresses both the theoretical and practical aspects of modern silicon devices and the relationship between their electrical properties and processing conditions. The book is compiled from the author s industrial and academic lecture notes and reflects years of experience in the development of silicon devices. §Features include:§§§A review of silicon properties which provides a foundation for understanding the device properties discussion, including mobility-enhancement by straining silicon;§§§State-of-the-art technologies on high-K gate dielectrics, low-K dielectrics, Cu interconnects, and SiGe BiCMOS;§§§CMOS-only applications, such as subthreshold current and parasitic latch-up;§§§Advanced Enabling processes and process integration.§§This book is written for engineers and scientists in semiconductor research, development and manufacturing. The problems at the end of each chapter and the numerous charts, figures and tables also make it appropriate for use as a text in graduate and advanced undergraduate courses in electrical engineering and materials science.

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Silicon Devices and Process Integration

Deep Submicron and Nano-Scale Technologies

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