Carte Silicon Carbide Microelectromechanical Systems For Harsh Environments Cheung

Silicon Carbide Microelectromechanical Systems For Harsh Environments

Limbă: engleză
Legare: Copertă tare
Disponibilitate: șansă 50%
Şanse de a obține acest titlu
695.55 lei
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanica...

Informații despre carte

Limbă
engleză
Legare
Carte - Copertă tare
Publicat
2006
Pagini
192
EAN
9781860946240
ISBN
1860946240
Enbook ID
05121835
Greutate
482
Dimensiuni
164 x 233 x 20

Descriere completă

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.

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