Semiconductor Lithography

Name: Semiconductor Lithography
Brand: Springer-Verlag New York Inc.
SKU: 9781461282280
Price: 827.7 RON
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Principles, Practices, and Materials

Autor: Wayne M. Moreau

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Legare: Carte broșată

Editura: Springer-Verlag New York Inc.

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Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based c...

Informații despre carte

Autor

Wayne M. Moreau

Limbă

engleză

Legare

Carte - Carte broșată

Publicat

2012

Pagini

952

EAN

9781461282280

ISBN

1461282284

Enbook ID

02174532

Editura

Springer-Verlag New York Inc.

Greutate

1606

Dimensiuni

170 x 244 x 51

Descriere completă

Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lithography, as adopted by the semiconductor industry, is the process of drawing or printing the pattern of an integrated circuit in a resist material. The pattern is formed and overlayed to a previous circuit layer as many as 30 times in the manufacture of logic and memory devices. With the resist pattern acting as a mask, a permanent device structure is formed by subtractive (removal) etching or by additive deposition of metals or insulators. Each process step in lithography uses inorganic or organic materials to physically transform semiconductors of silicon, insulators of oxides, nitrides, and organic polymers, and metals, into useful electronic devices. All forms of electromagnetic radiation are used in the processing. Lithography is a mUltidisciplinary science of materials, processes, and equipment, interacting to produce three-dimensional structures. Many aspects of chemistry, electrical engineering, materials science, and physics are involved. The purpose of this book is to bring together the work of many scientists and engineers over the last 10 years and focus upon the basic resist materials, the lithographic processes, and the fundamental principles behind each lithographic process.

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Semiconductor Lithography

Principles, Practices, and Materials

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