Carte Process development for nanostructuring and 3D micro/nanointegration Senn Tobias

Process development for nanostructuring and 3D micro/nanointegration

Autor: Senn Tobias
Limbă: engleză
Legare: Carte broșată
Disponibilitate: În depozitul extern
Expediem în 8-11 zile
249.54 lei
Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces....

Informații despre carte

Autor
Limbă
engleză
Legare
Carte - Carte broșată
Publicat
2015
Pagini
180
EAN
9783838150284
ISBN
3838150287
Enbook ID
09187233
Greutate
272
Dimensiuni
152 x 229 x 10

Descriere completă

Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces. Therefore, such structures can be used to functionalize surfaces and adjust the surface properties to the specific requirements of a certain application. A remaining challenge is the integration of functional structures into micro devices to achieve e.g. patterning in 3D, 3D surface structures and sidewall patterning. This work is focused on the development of processes to achieve both, the accurate replication of micro and nanostructures as well as the integration of functional surface structures into micro devices.

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