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Carte Predictive Simulation of Semiconductor Processing Jarek Dabrowski

Predictive Simulation of Semiconductor Processing

Status and Challenges

Autor: Jarek Dabrowski, Eicke R. Weber
Limbă: engleză
Legare: Carte broșată
Editura: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Disponibilitate: În depozitul extern
Expediem în 5-8 zile
1 215.61 lei
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s...

Informații despre carte

Autor
Jarek Dabrowski, Eicke R. Weber
Limbă
engleză
Legare
Carte - Carte broșată
Publicat
2010
Pagini
490
EAN
9783642058042
ISBN
3642058043
Enbook ID
01651135
Editura
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Greutate
859
Dimensiuni
155 x 235 x 28

Descriere completă

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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