Predictive Simulation of Semiconductor Processing

Name: Predictive Simulation of Semiconductor Processing
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 9783540204817
Price: 1215.34 RON
Availability: InStock

Status and Challenges

Autor: Jarek Dabrowski, Eicke R. Weber

Limbă:

Legare: Copertă tare

Editura: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Disponibilitate: În depozitul extern

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1 215.34 lei

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s...

Informații despre carte

Autor

Jarek Dabrowski, Eicke R. Weber

Limbă

engleză

Legare

Carte - Copertă tare

Publicat

2004

Pagini

490

EAN

9783540204817

ISBN

3540204814

Enbook ID

01558777

Editura

Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Greutate

1028

Dimensiuni

155 x 235 x 36

Descriere completă

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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Predictive Simulation of Semiconductor Processing

Status and Challenges

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Descriere completă

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