Plasma-Surface Interactions and Processing of Materials

Name: Plasma-Surface Interactions and Processing of Materials
Brand: Springer Netherlands
SKU: 9780792305842
Price: 1651.19 RON
Availability: InStock

Autor: Orlando Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm

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Legare: Copertă tare

Editura: Springer Netherlands

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An understanding of the processes involved in the basic and applied physics and chemistry of the int...

Informații despre carte

Autor

Orlando Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm

Limbă

engleză

Legare

Carte - Copertă tare

Publicat

1990

Pagini

558

EAN

9780792305842

ISBN

0792305841

Enbook ID

01392866

Editura

Springer Netherlands

Greutate

980

Dimensiuni

156 x 234 x 31

Descriere completă

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

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Plasma-Surface Interactions and Processing of Materials

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