Carte Nanopositioning Technologies Changhai Ru

Nanopositioning Technologies

Fundamentals and Applications

Limbă: engleză
Legare: Copertă tare
Disponibilitate: În depozitul extern
Expediem în 10-13 zile
552.30 lei
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and ac...

Informații despre carte

Limbă
engleză
Legare
Carte - Copertă tare
Publicat
2015
Pagini
409
EAN
9783319238524
ISBN
3319238523
Enbook ID
09493694
Greutate
966
Dimensiuni
155 x 235 x 29

Descriere completă

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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