Microelectromechanical Systems - Materials and Devices: Volume 1052

Name: Microelectromechanical Systems - Materials and Devices: Volume 1052
Brand: Materials Research Society
SKU: 9781558999909
Price: 751.37 RON
Availability: InStock

Autor: David. A LaVan

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Legare: Copertă tare

Editura: Materials Research Society

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This book is part of a popular series on the materials science of MEMS devices, first published in 1...

Informații despre carte

Autor

David. A LaVan

Limbă

engleză

Legare

Carte - Copertă tare

Publicat

2008

Pagini

325

EAN

9781558999909

ISBN

1558999906

Enbook ID

02060456

Editura

Materials Research Society

Greutate

630

Dimensiuni

160 x 235 x 25

Descriere completă

This book is part of a popular series on the materials science of MEMS devices, first published in 1999. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there REMAINS a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.

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Microelectromechanical Systems - Materials and Devices: Volume 1052

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