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This book provides the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications).§MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. The development of micro-mechanical systems (MEMS) foreshadows momentous changes not only in the technology world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication process technologies and related-materials, to developing high-performance microscale systems, devices, and structures. Materials and process integration for MEMS offer unique, in-depth coverage of the science of miniaturization, its fabrication process techniques (including surface silicon micromachining, bulk silicon micromachining, lithography, precision grinding process, plasma etching process, SCREAMTM process, X-ray based fabrication, and novel techniques), materials (including silicon, UVIII resist, Gallium Arsenide (GaAs), TiNiCu films, Self-Assembled Monolayers (SAM), SU-8, polymers, ferro-electric BST thin film, etc.), their characterization and potential applications.§Materials & Process Integration for MEMS offers unique and important information to both academics and professionals whom are active in the field of MEMS.
