Ion Sources

Name: Ion Sources
Brand: Springer, Berlin
SKU: 9783540657477
Price: 1215.34 RON
Availability: InStock

Autor: hang Huashun

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Legare: Copertă tare

Editura: Springer, Berlin

Disponibilitate: În depozitul extern

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Ion implantation has become a basic technology in device manufacturing. For efficient use of this ac...

Informații despre carte

Autor

hang Huashun

Limbă

engleză

Legare

Carte - Copertă tare

Publicat

1999

Pagini

476

EAN

9783540657477

ISBN

3540657479

Enbook ID

01566924

Editura

Springer, Berlin

Greutate

894

Dimensiuni

156 x 234 x 26

Descriere completă

Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.

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