Ion Implantation: Equipment and Techniques

Name: Ion Implantation: Equipment and Techniques
Brand: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
SKU: 9783642691584
Price: 553.98 RON
Availability: InStock

Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13 17, 1982

Autor: H. Glawischnig, H. Ryssel

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Legare: Carte broșată

Editura: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

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The Fourth International Conference on Ion Implantation: Equipment and Tech niques was held at the C...

Informații despre carte

Autor

H. Glawischnig, H. Ryssel

Limbă

engleză

Legare

Carte - Carte broșată

Publicat

2011

Pagini

558

EAN

9783642691584

ISBN

3642691587

Enbook ID

06973522

Editura

Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Greutate

855

Dimensiuni

155 x 235 x 31

Descriere completă

The Fourth International Conference on Ion Implantation: Equipment and Tech niques was held at the Convention Center in Berchtesgaden, Bavaria, Germany, from September 13 to 17, 1982. It was attended by more than 200 participants from over 20 different countries. Severa1 series of conferences have dealt with the app1ication of ion implantation to semiconductors and other materials (Thousand Oaks, 1970; Garmisch-Partenkirchen, 1971; Osaka, 1974; Warwick, 1975; Bou1der, 1975; Budapest, 1978; and Albany, 1980). Another series of conferences has been devoted to implantation equipment and techniques (S- ford, 1977; Trento, 1978; and Kingston, 1980). This conference was the fourth in the 1atter series. Twe1ve invited papers and 55 contributed papers covered the areas of ion implantation equipment, measuring techniques, and app1ica tions of implantation to metals and semiconductors. A schoo1 on ion implantation was held in connection with the conference, and the 1ectures presented at this schoo1 were pub1ished as Vo1. 10 of the Springer Series in E1ectrophysics under the tit1e Ion Implantation Techniques (edited by H. Rysse1 and H. G1awischnig). During the conference, space was also provided for presentations and demonstrations by manufacturers of ion implantation equipment. Once again, this conference provided a forum for free discussion among implantation specia1ists in industry as we11 as research institutions. Espe cially effective in stimulating a free exchange of information was the daily get-together over free beer at the "Bier Adam". Many people contributed to the success of this conference.

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Ion Implantation: Equipment and Techniques

Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13 17, 1982

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