Carte Flash Lamp Annealing Lars Rebohle

Flash Lamp Annealing

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Legare: Carte broșată
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714.62 lei
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for therma...

Informații despre carte

Limbă
engleză
Legare
Carte - Carte broșată
Publicat
2020
Pagini
288
EAN
9783030233013
ISBN
3030233014
Enbook ID
33089429
Greutate
474
Dimensiuni
155 x 235 x 17

Descriere completă

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

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