Amorphous Silicon Carbide for MEMS Applications

Name: Amorphous Silicon Carbide for MEMS Applications
Brand: VDM Verlag
SKU: 9783639305272
Price: 350.09 RON
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Autor: Arnab Choudhury

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Editura: VDM Verlag

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This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-...

Informații despre carte

Autor

Arnab Choudhury

Limbă

engleză

Legare

Carte - Carte broșată

Publicat

2010

Pagini

180

EAN

9783639305272

ISBN

3639305272

Enbook ID

06837491

Editura

VDM Verlag

Greutate

272

Dimensiuni

152 x 229 x 10

Descriere completă

This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe.

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