Aligned Ion Implantation Using Scanning Probes

Name: Aligned Ion Implantation Using Scanning Probes
Brand: VDM Verlag Dr. Mueller E.K.
SKU: 9783639049213
Price: 273.46 RON
Availability: InStock

Towards Precise Single Ion Placement for a SolidState Quantum Computer

Autor: Arun Persaud

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Legare: Carte broșată

Editura: VDM Verlag Dr. Mueller E.K.

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273.46 lei

A new technique for precise ion implantation has been§developed using a scanning probe that has been...

Informații despre carte

Autor

Arun Persaud

Limbă

engleză

Legare

Carte - Carte broșată

Publicat

2008

Pagini

112

EAN

9783639049213

ISBN

3639049217

Enbook ID

06814445

Editura

VDM Verlag Dr. Mueller E.K.

Greutate

159

Dimensiuni

152 x 229 x 6

Descriere completă

A new technique for precise ion implantation has been§developed using a scanning probe that has been§equipped with a small aperture and incorporated into§an ion beamline. Ions are passed through the aperture§and implanted into a sample. By using a scanning§probe the target can be imaged in a non-destructive§way prior to implantation. The probe can be placed at§the desired location with nanometer precision.§§§With this approach a final placement accuracy of§about 10 nm is envisioned, limited by straggling and§the aperture size. In this work a feature size down§to 120 nm has been demonstrated.§§§This research is part of a program for the§development of test structures for a quantum§computer. For this application the placement accuracy§needs to be increased and a detector for single ion§detection has to be integrated into the setup. Both§these issues are discussed.§§§To achieve single ion detection highly charged ions§are used, since the additional potential energy§released by these ions on impact should lead to an§easier detection of each ion. The highly charged ions§were produced using a specialized ion source and§their creation and interactions with solids are§described in detail.

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Aligned Ion Implantation Using Scanning Probes

Towards Precise Single Ion Placement for a SolidState Quantum Computer

Informații despre carte

Descriere completă

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