Chemistry and Lithography

Chemistry and Lithography provides a comprehensive treatmentof the chemical phenomena in lithography in a manner that isaccessible to a wide readership. The book presents topics on theoptical and charged particle physics practiced in lithography, witha broader view of how the marriage between chemistry and optics hasmade possible the print and electronic revolutions of the digitalage. The related aspects of lithography are thematically presentedto convey a unified view of the developments in the field overtime, from the very first recorded reflections on the nature ofmatter to the latest developments at the frontiers of lithographyscience and technology.

Part I presents several important chemical and physicalprinciples involved in the invention and evolution of lithography.Part II covers the processes for the synthesis, manufacture, usage, and handling of lithographic chemicals and materials. Part IIIinvestigates several important chemical and physical principlesinvolved in the practice of lithography. Chemistry andLithography is a useful reference for anyone working in thesemiconductor industry.